Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
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Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano-structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the p...
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ژورنال
عنوان ژورنال: IUCrJ
سال: 2017
ISSN: 2052-2525
DOI: 10.1107/s2052252517006297